Topic: 3D Nanostructures

9.10.2015
New Book Chapter: “Self-assembly of block copolymers by graphoepitaxy”
We have written a book chapter about the self-assembly of block copolymers by graphoepitaxy. In the fabrication of a desired block copolymer (BCP) nanostructure for a particular application, a key challenge... Read more >>
Tags: 3D Nanostructures, Nanofabrication, News

9.29.2014
Recent Paper Editor’s Pick JVST B
Congrats to Hyung Wan Do on his recent paper being chosen as an editor's pick in JVST B.   Editor's Pick
Tags: 3D Nanostructures, Electron-beam Lithography, HSQ, Nanofabrication, PMMA, Research

8.25.2014
New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB
We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated in... Read more >>
Tags: 3D Nanostructures, Electron-beam Lithography, HSQ, Nanofabrication, PMMA, Resists