Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren and Dr. P. Donald Keathley

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Recent Paper Editor’s Pick JVST B

Recent Paper Editor’s Pick JVST B

Sep 29, 2014 | News Articles

Congrats to Hyung Wan Do on his recent paper being chosen as an editor’s pick in JVST B.   Editor’s Pick
Recent Paper Editor’s Pick JVST B

New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB

Aug 25, 2014 | News Articles, Our Research

We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated...

Recent Posts

  • Malick Sere receives the 2026 Frederick C. Hennie III Teaching Award
  • New Publication: Field-resolved observation of exciton coherence in a van der Waals magnet
  • QNN Newsletter from IAP 2026
  • New Publication: Electron energy loss spectroscopy of two-dimensional materials in a scanning electron microscope
  • New Publication on High-speed testing of superconducting electronics

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