Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren and Dr. P. Donald Keathley

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New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB

New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB

Aug 25, 2014 | News Articles, Our Research

We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated...
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Recent Posts

  • Joey Alongi, Reed Foster, and DJ Paul awarded fellowships
  • QNN Summer 2025 Newsletter
  • Karl K. Berggren selected as the Julius A. Stratton Professor in Electrical Engineering and Physics
  • Congrats to John Simonaitis and Owen Medeiros on their successful Theses Defenses!
  • New Publication: Bandwidth of Lightwave-Driven Electronic Response from Metallic Nanoantennas

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