Quantum Nanostructures and
Nanofabrication Group

Prof. Karl K. Berggren and Dr. P. Donald Keathley

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Recent Paper Editor’s Pick JVST B

Recent Paper Editor’s Pick JVST B

Sep 29, 2014 | News Articles

Congrats to Hyung Wan Do on his recent paper being chosen as an editor’s pick in JVST B.   Editor’s Pick
Recent Paper Editor’s Pick JVST B

New paper: “Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists” accepted to JVSTB

Aug 25, 2014 | News Articles, Our Research

We developed two processes for fabricating three-dimensional nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. We demonstrated self-aligned mushroom-shaped posts and freestanding supported structures that were fabricated...

Recent Posts

  • Dr Keathley’s Talk on Nanoscale Petahertz Electronics now available
  • QNN Winter 2025 Newsletter
  • Karl Berggren named faculty head of electrical engineering in EECS
  • New Publication: On-chip petahertz electronics for single-shot phase detection
  • Fall 2024 QNN Newsletter

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